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Monash Mas - UV Led Mask Aligner
tm3311814089
Category of Technology / Product
  • Description
  • Intellectual Property
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We have invented a UV led based mask aligner system, An equipment that can be sued for manufacturing IC's and mems chips. Innovative automation and sensor system, and lens less optics are the key inventive steps that aided in 90% less production cost with assured state of the art function and beyond.

Industrial Design
No
Trademarks
No
Patent
No
Other IP Protection
No
Organization Name
Organization Category
Address

Monash University Malaysia,
Jalan Lagoon Selatan, Bandar Sunway,

47500 Subang Jaya
Selangor
Malaysia

Full Name [1]
Dr. Narayanan Ramakrishnan
Email [1]
ramakrishnan@monash.edu